LAM

Typical Mask Specifications

  • Minimum Address Grid: 20nm
  • Minimum Feature Size: Lines: 1.0µm and Holes: 1.5µm
  • CD Tolerance: ± 150nm
  • CD Range/Uniformity: ± 150nm
  • Registration: ± 200nm
  • Min Defect Size: 1.5µm

Tighter specifications can be provided. Please contact our Sales Team to discuss your particular needs.

Typical Large Area Mask Blank Sizes/Substrate Type

(other options may be available upon request)

SUBSTRATE SIZE

QUARTZ

SODA LIME

BOROFLOAT

SUBSTRATE THICKNESS

8" X 8"

NO

YES

NO

0.12"

9" X 9"

YES

YES

YES

0.12"

14" X 14"

YES

YES

YES

0.12”(SL) ; 0.19“(SL); 0.20“(QZ)

16" X 16"

YES

YES

NO

0.12”(SL);0.19“ (SL); 0.20“(QZ)

17" X 17"

      

Please Enquire

18" X 18"

NO

YES

NO

0.19"

20" X 20"

      

Please Enquire
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