Mask Protection Technology MPT™

MPT is a cost-effective way to reduce cycle time and improve wafer-process yield. While the thin, optically transparent coating reduces sticking to your mask during contact and proximity printing, the fluoropolymer reduces the number of mask cleanings, extending the life of the mask and improving throughput by increasing the number of exposures between mask cleanings. MPT is also chemical resistant with no effect on resolution.

• Reduces defects on wafers by providing an anti-stick layer, significantly minimizing the adhesion of resist onto the mask
• Improves wafer process yield thereby reducing cost and cycle time
• Prolongs the life of the photomask by reducing the need to clean the mask as often
• Can be cleaned with common cleaning agents
• Makes contact imaging more efficient